Parylene coating system series 2000 with rotary drum.
Rotary drum system for parylene coating and even distribution. Compact coating machine with integrated pump and cooling system. Works best with smaller substrates.
Dimensions: | L: 2600mm W: 960 H: 1460mm |
Weight: | ~ 200 KG |
Volume: | 80 litres |
Process chamber: | 400mm Ø H: 600mm |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible |
Cooling system: | 4 liter (electromechanical Cool-trap) |
Vacuum connection: | DIN 40 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | 50m³/h |
Electrical connection: | 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW |