The parylene coating process in detail

Course of a parylene coating process

The process takes place in three stages:

1.Evaporation Dipara-xylylene dimer

2. Pyrolysis Para-xylylene monomer

3. Condensation Polypara-xylylene polymer

As a result of the pyrolysis of the gas, the next step is aimed at splitting the monomeric form of the dimer.

Finally, the gas is separated at room temperature inside a coating chamber.

This leaves a transparent and also very thin and homogeneous polymer film on the surfaces.

Deposition rates > 0.007 mm/h

Layer thicknesses 0.1 to 100 µm

Primers and dimers (raw materials: C, N, D, F, AF4)