This is the Parylene system. It is a modular system divided into two parts: chamber module and evaporator module.
| Dimensions: | L: 2400mm W: 960 H: 1460mm |
| Weight: | ~ 350 KG |
| Volume: | 600 / 700 Liter |
| Process chamber: | 800mm Ø H: 1100mm (600 Liter) / 1300mm (700 Liter) |
| Plasma source: | 2,45GHz, 1200 Watt |
| Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible |
| Cooling system: | 8 liter (electromechanical Cool-trap) |
| Vacuum connection: | DIN 63 ISO-KF |
| Venting: | electromagnetic solenoid valve |
| Pump system: | 75m³/h |
| Electrical connection: | 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW |
